Extreme Ultraviolet Lithography

Amazon.com Price: $146.00 (as of 05/12/2019 20:27 PST- Details)

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Description

Master Extreme Ultraviolet Lithography Techniques

Produce high-density, ultrafast microchips the use of the contemporary EUVL methods. Written by industry experts, Extreme Ultraviolet Lithography main points the equipment, materials, and procedures required to radically extend fabrication capabilities to wavelengths of 32 nanometers and below. Work with masks and resists, configure high-reflectivity mirrors, conquer power and thermal challenges, reinforce resolution, and minimize wasted energy. You are going to also learn to use Mo/Si deposition technology, fine-tune performance, and optimize cost of ownership.

Design EUVL-able photomasks, withstand layers, and source-collector modules
Assemble optical components, mirrors, microsteppers, and scanners
Harness laser-produced and discharge pulse plasma sources
Enhance resolution the use of proximity correction and phase-shift
Generate modified illumination the use of holographic elements
Measure vital dimensions the use of metrology and scatterometry
Deploy stable Mo/Si coatings and high-sensitivity multilayers
Handle mask defects, layer imperfections, and thermal instabilities

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Extreme Ultraviolet Lithography

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