Fundamental Principles of Optical Lithography: The Science of Microfabrication

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The fabrication of an integrated circuit requires plenty of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these quite a lot of components millions of transistors will also be built and wired together to form the complex circuitry of up to date microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical remedy of the topic of lithography for both students and researchers. It contains ten detailed chapters plus three appendices with problems provided at the end of every chapter.

Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader’s understanding as the website supplies information on how You’ll be able to download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You’ll be able to also contact the creator and find assist for instructors.

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Fundamental Principles of Optical Lithography: The Science of Microfabrication

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